EC8001 - MEMS AND NEMS (Syllabus) 2017-regulation Anna University

EC8001 - MEMS AND NEMS (Syllabus) 2017-regulation Anna University

EC8001

MEMS AND NEMS

 LPTC

3003

OBJECTIVES:
• To introduce the concepts of micro and nano electromechanical devices
• To know the fabrication process of Microsystems
• To know the design concepts of micro sensors and micro actuators
• To introduce the concepts of quantum mechanics and nano systems

UNIT I

INTRODUCTION TO MEMS AND NEMS

9

Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical Systems, Applications of Micro and Nanoelectromechanical systems, Materials for MEMS and NEMS: Silicon, silicon compounds, polymers, metals.

UNIT II

MEMS FABRICATION TECHNOLOGIES

9

Photolithography, Ion Implantation, Diffusion, Oxidation, CVD, Sputtering Etching techniques, Micromachining: Bulk Micromachining, Surface Micromachining, LIGA.


UNIT III

MICRO SENSORS

9

MEMS Sensors: Design of Acoustic wave sensors, Vibratory gyroscope, Capacitive Pressure sensors, Case study: Piezoelectric energy harvester

UNIT IV

MICRO ACTUATORS

9

Design of Actuators: Actuation using thermal forces, Actuation using shape memory Alloys, Actuation using piezoelectric crystals, Actuation using Electrostatic forces, Case Study:RF Switch.

UNIT V

NANO DEVICES

9

Atomic Structures and Quantum Mechanics, Shrodinger Equation, ZnO nanorods based NEMS device: Gas sensor.

TOTAL: 45 PERIODS

OUTCOMES: On successful completion of this course, the student should be able to:
• Interpret the basics of micro/nano electromechanical systems including their applications and advantages
• Recognize the use of materials in micro fabrication and describe the fabrication processes including surface micromachining, bulk micromachining and LIGA.
• Analyze the key performance aspects of electromechanical transducers including sensors and actuators
• Comprehend the theoretical foundations of quantum mechanics and Nano systems

REFERENCES:
1. Marc Madou, ―Fundamentals of Microfabrication‖, CRC press 1997.
2. Stephen D. Senturia,‖ Micro system Design‖, Kluwer Academic Publishers,2001
3. Tai Ran Hsu ,‖MEMS and Microsystems Design and Manufacture‖ ,Tata Mcraw Hill, 2002.
4. Chang Liu, ―Foundations of MEMS‖, Pearson education India limited, 2006,
5. Sergey Edward Lyshevski, ―MEMS and NEMS: Systems, Devices, and Structures‖ CRC Press, 2002

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