EE6007 - MICRO ELECTRO MECHANICAL SYSTEMS (Syllabus) 2013-regulation Anna University

EE6007 - MICRO ELECTRO MECHANICAL SYSTEMS (Syllabus) 2013-regulation Anna University

EE6007	MICRO ELECTRO MECHANICAL SYSTEMS	LPTC

3003

OBJECTIVES:

• To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
• To educate on the rudiments of Micro fabrication techniques.
• To introduce various sensors and actuators
• To introduce different materials used for MEMS
• To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.

UNIT I	INTRODUCTION	9

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II	SENSORS AND ACTUATORS-I	9

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors - Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph - Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys.

UNIT III	SENSORS AND ACTUATORS-II	9

Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.

UNIT IV	MICROMACHINING	9

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies - Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process - Assembly of 3D MEMS – Foundry process.

UNIT V	POLYMER AND OPTICAL MEMS	9

Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

TOTAL : 45 PERIODS

OUTCOMES:

• Ability to understand the operation of micro devices, micro systems and their applications.
• Ability to design the micro devices, micro systems using the MEMS fabrication process.

TEXT BOOKS:

1. Chang Liu, ‘Foundations of MEMS’, Pearson Education Inc., 2012.
2. Stephen D Senturia, ‘Microsystem Design’, Springer Publication, 2000.
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.

REFERENCES:

1. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.
2. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2001.
3. Julian w. Gardner, Vijay K. Varadan, Osama O.Awadelkarim, Micro Sensors MEMS and Smart Devices, John Wiley & Son LTD, 2002.
4. James J.Allen, Micro Electro Mechanical System Design, CRC Press Publisher, 2005.
5. Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer, 2010.