EE8091 - MICRO ELECTRO MECHANICAL SYSTEMS (Syllabus) 2017-regulation Anna University

EE8091 - MICRO ELECTRO MECHANICAL SYSTEMS (Syllabus) 2017-regulation Anna University

EE8091	MICRO ELECTRO MECHANICAL SYSTEMS	LPTC

3003

OBJECTIVES:

• To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
• To educate on the rudiments of Micro fabrication techniques.
• To introduce various sensors and actuators
• To introduce different materials used for MEMS
• To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.

UNIT I	INTRODUCTION	9

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II	SENSORS AND ACTUATORS-I	9

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors - Thermal Sensing and Actuation

UNIT III	SENSORS AND ACTUATORS-II	9

Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.

UNIT IV	MICROMACHINING	9

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies - Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process - Assembly of 3D MEMS – Foundry process.

UNIT V	POLYMER AND OPTICAL MEMS	9

Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

TOTAL : 45 PERIODS

OUTCOMES:

• Ability to understand and apply basic science, circuit theory, Electro-magnetic field theory control theory and apply them to electrical engineering problems.
• Ability to understand and analyse, linear and digital electronic circuits.

TEXT BOOKS:

1. Chang Liu, "Foundations of MEMS", Pearson Education Inc., 2006.
2. Stephen D Senturia, "Microsystem Design", Springer Publication, 2000.
3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.

REFERENCES

1. James J.Allen, "Micro Electro Mechanical System Design", CRC Press Publisher, 2010
2. Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, "Micro Sensors MEMS and Smart Devices", John Wiley & Son LTD,2002
3. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
4. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.
5. Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer 2012.