TIEE3022 Syllabus - Mems And Nems - 2022 Regulation Anna University

TIEE3022 Syllabus - Mems And Nems - 2022 Regulation Anna University

TIEE3022

MEMS AND NEMS

 L T P C

2023

COURSE OBJECTIVES:
• To introduce the diverse technological and functional approaches of MEMS/NEMS and applications.
• To understand the microstructures and fabrication methods.
• To provide an insight of micro and nano sensors, actuators.
• To emphasis the need for NEMS technology.
• To update the ongoing trends and real time applications of MEMS and NEMS technology.

UNIT I

INTRODUCTION TO MEMS and NEMS

6

Overview of Micro electro mechanical systems and Nano Electro mechanical systems, devices and technologies, Laws of scaling- Materials for MEMS and NEMS - Applications of MEMS and NEMS.

UNIT II

MICRO-MACHINING AND MICROFABRICATION TECHNIQUES

6

Photolithography- Micro manufacturing, Bulk micro machining, surface micro machining, LIGA.


UNIT III

MICRO SENSORS AND MICRO ACTUATORS

6

Micromachining : Capactive Sensors- Piezoresistive Sensors- Piezoelectric actuators.

UNIT IV

NEMS TECHNOLOGY

6

Atomic scale precision engineering- Nano Fabrication techniques – NEMS for sensors and actuators.

UNIT V

MEMS and NEMS APPLICATION

6

Bio MEMS- Optical NEMS- Micro motors- Smart Sensors - Recent trends in MEMS and NEMS.

TOTAL: 30+30 = 60 PERIODS

COURSE OUTCOMES: At the end of this course, the students will have the ability to
CO1: Explain the material properties and the significance of MEMS and NEMS for industrial automation.
CO2: Demonstrate knowledge delivery on micromachining and micro fabrication.
CO3: Apply the fabrication mechanism for MEMS sensor and actuators.
CO4: Apply the concepts of MEMS and NEMS to models ,simulate and process the sensors and actuators.
CO5: Improved Employability and entrepreneurship capacity due to knowledge up gradation on MEMS and NEMS technology.

TEXT BOOKS:
1. Chang Liu, “Foundations of MEMS”, Pearson International Edition, 2011, 2nd Edition.
2. Tai-.Ran Hsu, “MEMS and Microsystems: design , manufacture, and Nanoscale”- 2nd Edition, John Wiley & Sons, Inc., Hoboken, New Jersey, 2008.
3. Lyshevski, S.E. “ Nano- and Micro-Electromechanical Systems: Fundamentals of Nano-and Microengineering “ (2nd ed.). CRC Press,2005.
4. Julian W Gardner and Vijay K Varadan, “ Microsensors, MEMS and Smart Devices”, John Wiley and Sons Ltd, 2001, 1st Edition.

REFERENCES:
1. Marc F madou“ Fundamentals of micro fabrication” CRC Press 2002 2nd Edition Marc Madou.
2. M.H.Bao “Micromechanical transducers :Pressure sensors, accelerometers and gyroscopes”,Elsevier, Newyork, 16 Oct 2000, 1st Edition.
3. Maluf, Nadim “An introduction to Micro Electro-mechanical Systems Engineering “AR Tech house, Boston, June 30 2004, 2nd Edition.
4. Mohamed Gad – el – Hak “MEMS Handbook” Edited CRC Press 2001, 1st Edition.

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